Santos,, Manuel Armando Oliveira Pereira dos Deposition and properties of titanium nitride films produced by dc reactive magnetron sputtering / Li-Jiang Meng, A. Azevedo and M. P. dos Santos

Deposition and properties of titanium nitride films produced by dc reactive magnetron sputtering / Li-Jiang Meng, A. Azevedo and M. P. dos Santos
539.23