Handbook of chemical vapor deposition (CDV) : principles, technology, and applications / Hugh O. Pierson
Main Author
Pierson, Hugh O.
Country
Estados Unidos.
Edition
2nd ed
Publication
New York : Noyes Publications, cop. 1999
Description
XXIV, 482 p. :
il. ;
24 cm
Series
Materials science and process technology series electronic materials and process technology
ISBN
0-8155-1432-8
CDU
621.793.3
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