000 00764nam0a22002290004500
001 50260
005 20200804110505.0
010 _a0-8194-0479-9
_bBrochado
090 _a50260
100 _a19910912d1990 k y0pory5003 ba
101 0 _aeng
102 _aUS
200 1 _aSelected papers on optical shop metrology
_fed. Daniel Malacara
210 _aBellingham
_cSPIE Optical Engineering Press
_d1990
215 _aXIII, 702 p.
_cil.
_d28 cm
225 2 _aSPIE milestone series
_v18
675 _a535
_vint
_zeng
675 _a53.08
_vint
_zeng
702 1 _9111319
_aMalacara,
_bDaniel
_4340
801 0 _aPT
_bUMSD
_c20100106
_gRPC
942 _cLIVRO
_n0