| 000 | 00825nam-a2200217---4500 | ||
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| 001 | 207116 | ||
| 005 | 20200804141058.0 | ||
| 010 |
_a0-8155-1432-8 _bEncadernado |
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| 090 | _a207116 | ||
| 100 | _a20010326d1992 k y0pory5003 ba | ||
| 101 | 0 | _aeng | |
| 102 | _aUS | ||
| 200 | 1 |
_aHandbook of chemical vapor deposition (CDV) _eprinciples, technology, and applications _fHugh O. Pierson |
|
| 205 | _a2nd ed | ||
| 210 |
_aNew York _cNoyes Publications _dcop. 1999 |
||
| 215 |
_aXXIV, 482 p. _cil. _d24 cm |
||
| 225 | 2 |
_aMaterials science and process technology series _eelectronic materials and process technology |
|
| 675 |
_a621.793.3 _vint _zeng |
||
| 700 | 1 |
_aPierson, _bHugh O. |
|
| 942 |
_cLIVRO _n0 |
||