Mattox,, Donald M. Handbook of physical vapor deposition (PDV) processing : film formation, adhesion, surface preparation and contamination control / Donald M. Mattox

Handbook of physical vapor deposition (PDV) processing : film formation, adhesion, surface preparation and contamination control / Donald M. Mattox . - Westwood, N.J. : Noyes Publications, cop. 1998 . - XXVII, 917 p. : il. 24 cm
0-8155-1422-0 Encadernado

538.9