Handbook of thin film process technology / ed. David A. Glocker, S. Ismat Shah

Handbook of thin film process technology / ed. David A. Glocker, S. Ismat Shah . - Bristol : Institute of Physics Publishing, cop. 1995 . - 2 v. 24 cm . -
vol.1 : 782 p., pag. var
vol.2 : 452 p., pag. var.
0-7503-0311-5 (Obra completa) (Encadernada)

538.975