Pierson,, Hugh O. Handbook of chemical vapor deposition (CDV) : principles, technology, and applications / Hugh O. Pierson

Handbook of chemical vapor deposition (CDV) : principles, technology, and applications / Hugh O. Pierson . - 2nd ed . - New York : Noyes Publications, cop. 1999 . - XXIV, 482 p. : il. 24 cm . - (Materials science and process technology series)
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