Energy deposition and substrate heating during magnetron sputtering / M. Andritschky, F. Guimarães, V. Teixeira

Main Author Andritschky, M. Coauthor Guimarães, Fernanda Matos Gonçalves
Teixeira, Vasco M. P. Country Reino Unido. Analytic , V.44, nº 8 (1993), p. 809-813 CDU 538.9

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Holdings
Item type	Current location	Call number	Status	Date due	Barcode	Item holds
Monografia	Biblioteca de Reservados	BRE 538.9	Não requisitável \| Not for loan		122699
Monografia	Biblioteca de Reservados	BREG 538.9	Não requisitável \| Not for loan		149339