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Handbook of physical vapor deposition (PDV) processing : film formation, adhesion, surface preparation and contamination control / Donald M. Mattox

Main Author Mattox, Donald M. Country Estados Unidos. Publication Westwood, N.J. : Noyes Publications, cop. 1998 Description XXVII, 917 p. : il. ; 24 cm ISBN 0-8155-1422-0 CDU 538.9
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Holdings
Item type Current location Call number Status Date due Barcode Item holds Course reserves
Monografia Biblioteca Geral da Universidade do Minho
BGUM 538.9 - M Não requisitável | Not for loan 259722
Monografia Biblioteca da UMinho no Campus de Azurém
BPG 538.9 - M Available 285004

Mestrado Integrado em Engenharia Mecânica Complementos de Física 2º semestre

Monografia Biblioteca Geral da Universidade do Minho
BGUMD 110542 Available 320056
Monografia Biblioteca da UMinho no Campus de Azurém
BPG 538.9 - M Available 322397

Mestrado Integrado em Engenharia de Materiais Ciência e Tecnologia de Filmes Finos 2º semestre

Total holds: 0

Enhanced descriptions from Syndetics:

This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications.

The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired.

The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.

Table of contents provided by Syndetics

  • 1 Introduction
  • 2 Substrate ("Real") Surfaces and Surface Modification
  • 3 The Low-Pressure Gas and Vacuum Processing Environment
  • 4 The Low-Pressure Plasma Processing Environment
  • 5 Vacuum Evaporation and Vacuum Deposition
  • 6 Physical Sputtering and Sputter Deposition (Sputtering)
  • 7 Arc Vapor Deposition
  • 8 Ion Plating and Ion Beam Assisted Deposition
  • 9 Atomistic Film Growth and Some Growth-Related Film Properties
  • 10 Film Characterization and Some Basic Film Properties
  • 11 Adhesion and Deadhesion
  • 12 Cleaning
  • 13 External Processing Environment
  • Appendix 1 Reference Material
  • Appendix 2 Transfer of Technology from R&D To Manufacturing
  • Glossary of Terms and Acronyms Used in Surface Engineering

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