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Handbook of thin film process technology / ed. David A. Glocker, S. Ismat Shah

Secondary Author Glocker, David A.
Shah, S. Ismat David A.
Country Estados Unidos. Publication Bristol : Institute of Physics Publishing, cop. 1995 Description 2 v. ; 24 cm ISBN 0-7503-0311-5 (Obra completa) Contents note vol.1 : 782 p., pag. var vol.2 : 452 p., pag. var CDU 538.975
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Holdings
Item type Current location Call number Vol info Status Date due Barcode Item holds Course reserves
Monografia Biblioteca da UMinho no Campus de Azurém
BREG8 538.975 - H LIVRO vol.1 Não requisitável | Not for loan 243064

Mestrado Integrado em Engenharia de Materiais Ciência e Tecnologia de Filmes Finos 2º semestre

Monografia Biblioteca da UMinho no Campus de Azurém
BREG8 538.975 - H LIVRO vol.2 Não requisitável | Not for loan 243065
Total holds: 0

Enhanced descriptions from Syndetics:

This reference covers the most important thin film deposition techniques, as well as aspects of film processing and the major diagnostic techniques for in-process monitoring. It presents deposition system details and process parameters for a range of common materials and processes.

Em capa de argolas

vol.1 : 782 p., pag. var

vol.2 : 452 p., pag. var.

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