Lee,, Hong H. Fundamentals of microelectronics processing / Hong H. Lee

Fundamentals of microelectronics processing / Hong H. Lee . - New York : McGraw-Hill, cop. 1990 . - XVI, 514 p. : il. 24 cm . - (MacGraw-Hill chemical engineering series)
0-07-100796-2 (Brochado)

621.38